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Download Micro-Optics/Micromechanics and Laser Scanning and Shaping: 7-9 February 1995, San Jose, California (Proceedings of Spie--The International Society for Optical Engineering, V. 2383.) fb2, epub

by M. Edward Motamedi,Leo Beiser

Download Micro-Optics/Micromechanics and Laser Scanning and Shaping: 7-9 February 1995, San Jose, California (Proceedings of Spie--The International Society for Optical Engineering, V. 2383.) fb2, epub

ISBN: 0819417300
Author: M. Edward Motamedi,Leo Beiser
Language: English
Publisher: Society of Photo Optical; 1st Edition edition (June 1, 1995)
Pages: 482
Category: Engineering
Subcategory: Engineering
Rating: 4.4
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Size Fb2: 1426 kb
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Show Author Affiliations. Zhixin Li, Ferrofluidics Corp.

An effective and universally useful means of adjustment in the realm of precision engineering and optics became possible with the realization of a new driving mechanism.

Read Abstract +. Polysilicon microbeams in integral vacuum enclosures on silicon substrates have optical and mechanical properties that provide excellent opportunities for fiber-optic sensors. The microbeam, shell, and silicon substrate form a structure with Fabry-Perot-like properties that functions as an optomechanical modulator. An effective and universally useful means of adjustment in the realm of precision engineering and optics became possible with the realization of a new driving mechanism.

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Harrington, James A. and Harris, David M. and Katzir, Abraham. and Society of Photo-optical Instrumentation Engineers (. Harrington, James A. & Harris, David M. & Katzir, Abraham. amp; Society of Photo-optical Instrumentation Engineers (.

Technology: General Issues. Micro Optics Micromechanics & Laser Scanning. Proceedings of Spie-The International Society for Optical Engineering, V. 2383. By (author) Leo Beiser, By (author) M. Edward Motamedi.

This PDF file contains the front matter associated with SPIE Proceedings Volume 7361, including the .

Do you want to read the rest of this article? Request full-text. The contamination of optical surfaces by photon irradiation in the presence of background vacuum gases shortens optics lifetime and is one of the main concerns for reflection optics used in conjunction with intense light sources, such as high power lasers, 3rd and 4th generation synchrotron sources or plasma sources used in extreme ultraviolet lithography (EUVL) tools.

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